That's not really relevant to the licensor/licensee relationship, but from an academic perspective, how long would it have taken without the underlying US-taxpayer-funded research?
I got interested and started googling. Guess what I have found: "The EUV story begins in the mid-1980s in Japan when, building on multilayer mirror research done in Russia in the 70s, Hiroo Kinoshita projected the first EUV images." [0]
