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The sequential process performance ceiling will be set by physical limits. Photons at high frequenties have too much energy, for example gamma rays.

The practical ceiling will be set by manufacturing limitations for the next few decades: can we build structures atom by atom? [1]

[1] Richard Feynman "Tiny Machines" Nanotechnology Lecture - aka "There's Plenty of Room at the Bottom" https://www.youtube.com/watch?v=4eRCygdW--c&t=1390s