ASML sells the complete EUV lithography machine. Zeiss is one of their partners that supplies the optics. Trumpf makes the pulsed lasers which turn tin droplets into plasma which then produces the EUV light. They say they have many more research and supply partners, but those are the ones that I've found mentioned by name in press releases.
Do they design the actual tin droplet plasma chamber thing, or are they essentially a systems integrator from a bunch of suppliers putting it all together into their overall design to their specs?
This question doesn't make sense, both options involve designing the thing.
Anyway, it's not even about designing it. The technology had to be invented first. It would be crazy to use exploding metal drops in a vacuum chamber where you want to manufacture microchips if there were any other options but there were zero options before. There are few applications of EUV in general, and currently only one at those luminosity levels. So R&D is a big component here, not just manufacturing. And even if we only look at the manufacturing part, this isn't some "simple" vacuum chamber gadget either, only ~30 machines were built last year and they cost more than 100M$ each.
For comparison, four of these cost as much as one Wendelstein-7X. This is more of a big, barely productized science project shipped out as soon as it works just good enough for the chip manufacturers.
It could be some module within the vacuum chamber that has other uses and was already made by someone else for e.g. scientific experiment uses or something; I'm just asking if that part is made in house or is from another supplier.
