Yes, these machines are incredibly complex. Even the laser source is a $200M machine from Cymer that implements the same principles as the nations ignition facility by lasing microscopic droplets of molten tin that are falling in a vacuum. That requires rapid closed loop tracking of the tin droplets. It’s perhaps replicable but there’s a lot of art in EUV that took 30 years to develop. It’s not a simple job to clone that.
