well TSV have evolved greatly which means that 3D dies can come soon.
3D transistors already expanded the limit of how small parts can get before physics hits you in the face with a baseball bat.
On top of that memristors and graphene could open a whole new world for chip designers.
If we have only 2 cycles worth of process left we are doomed :)
to put that into perspective:
"An Australian team announced that they fabricated a single functional transistor out of 7 atoms that measured 4 nm in length."
Maybe we can make our way down to single atom transistors eventually, but who knows how long it will take to make that commercially viable.